Adixen ADP 122 High reliability to process • Wide interstage channels are able to accommodate large quantities of powder and particles. • High operating temperature with a precise closed-loop temperature management system, and a linear increase of gas temperature from inlet to outlet makes ADP 122 one of the best on market • Vertical pumping on each stage which prevents particulate accumulation in the swept volume.

Semiconductor fab rules compliant • Compact: the series 2 model is only 390 mm wide. • Clean: Alcatel technology is a frictionless and oil-free pump mechanism. There is no risk of particulate contamination. • Quiet: All models include an integrated silencer, eliminating the need for an additional external silencer. • Semi S2 compliant. ADP 122 L has a Low cost of ownership • Low power consumption at working pressures and at Ultimate Pressure. • With moderate heat generation, series 2 water consumption is extremely low. • Nitrogen Purge level is easily set by the customer. Pumps for clean applications do not require any purge.

Typical applications: • ADP 122 LM, ADS 602 LM:         Load Lock, Transfer Chambers, PVD, Sputtering • ADP 122 P, ADS 602 P, ADS 1202 P, ADS 1802 P:         Ashing, Stripping, Dielectric - Poly Etch, Implant Source, Medium CVD • ADS 602 H, ADS 1202 H, ADS 1802 H:         PECVD, LPCVD

A&J Vacuum also repair / rebuild and service Alcatel ADP 122, Adixen ADP-122 Pumps along with all other Alcatel Adixen Dry Pumps and Alcatel Vacuum Rotary Vane pumps. Please contact us for information on service program or click here http://www.ajvs.com/service.php to go to our Service page. We also offer Emergency service upon request. For more information Please contact A&J Vacuum Services at 973-249-0854